V. Zega C. Comi A. Corigliano C. Valzasina


This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.


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    How to Cite

    Zega, V., Comi, C., Corigliano, A., & Valzasina, C. (2014). Integrated structure for a resonant micro-gyroscope and accelerometer. Frattura Ed Integrità Strutturale, 8(29), pages 334–342. https://doi.org/10.3221/IGF-ESIS.29.29